Ƙayyadaddun bayanai | LMT-XY-200X200 | ABVT-Z20 (Air bearing dogo) |
Nau'in Motoci | Motar mara ƙarfe mai hawa uku | Motar muryoyin murya + |
Ƙaddamarwa | Tsohuwar adadin dijital 100nm | 1vpp zuwa 5nm |
Turar mota | Ci gaba da 60N/kololuwar 210N | Ci gaba da 60N/kololuwar 210N |
Matsakaicin girman mataki[nm] | 200nm ku | 100nm ku |
Tafiya [mm] | 200×200 | 10 |
Maimaituwa [um] | ± 0.3 | |
Daidaiton Matsayi [um] | ±1 | ± 0.5 |
Lalata [um] | 10um | 5um ku |
Madaidaici [um] | 1 um | 1 um |
Matsakaicin gudun [mm/s] | 500mm/s | 30mm/s |
Ƙarfin lodi [kg] | 5kg (Z axis tare da pneumatic akai-akai ma'auni ma'auni) |